Step Height and Warpage Measurement Instruments

ET Series

ET series can trace and analyze nano-level micro figures with high accuracy. It is well-suited not only for silicon wafers but also for soft sample surfaces by controlling the contacting force on the measuring sample, enabling the stylus to have a feather-light touch.

A variety of sample sizes is available, ranging from φ160mm to 2200mm x 2600mm, depending on the model.

ET4000A step height profiler
-- ET4000 --
--- ET200 ---
--- ET200 ---
ET8000 step height profiler
-- ET8000 --

ET200A / ET200A-3D

The Kosaka ET200A series measures step height, waviness, warpage, and surface roughness using a Linear-Motion Pick-up. The stylus moves vertically in a straight line, eliminating the arc-motion error associated with lever-type detectors. Adjustable measuring force supports measurements on soft material surfaces.

Choose the ET200A for 2D profile measurement, or the ET200A-3D with a motorized Y-axis and additional software for 3D surface measurement and analysis.

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    • Linear-Motion Pick-up: Moves the stylus vertically in a straight line, eliminating the arc-motion error associated with lever-type detectors.

    • Adjustable measuring force: 10–500 µN with the standard pick-up.

    • Specified scan straightness: 0.2 µm over 100 mm or less.

    • Sample observation: Monitor-based viewing assists measurement positioning.

    • 2D or 3D measurement: ET200A for 2D profiles; ET200A-3D for 3D surface measurement and analysis.

    • Pick-up mechanism: Linear-Motion Pick-up

    • Measuring force: 10–500 µN (standard pick-up)

    • ET200A: 2D profile measurement; manual Y-axis

    • ET200A-3D: 3D surface measurement and analysis; motorized Y-axis

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ET4000 Series

The Kosaka ET4000 series measures step height, waviness, warpage, surface roughness, and fine surface profiles using a Linear-Motion Pick-up. The stylus moves vertically in a straight line, eliminating the arc-motion error associated with lever-type detectors.

Adjustable measuring force from 0.5 to 500 µN supports measurements on delicate surfaces. A choice of stage sizes and measurement configurations accommodates different sample dimensions, with 3D measurement available on selected models.

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    • Linear-Motion Pick-up: Moves the stylus vertically in a straight line, eliminating arc-motion error.

    • Low measuring force: Adjustable from 0.5 to 500 µN to suit the sample surface.

    • Material versatility: Contact-based profiling supports evaluation of transparent and light-absorbing materials that can be challenging for optical measurement methods.

    • Flexible sample handling: Multiple stage sizes accommodate different sample dimensions.

    • 2D and 3D configurations: 3D measurement is standard on the ET4000AK and optional on the ET4000A, ET4000L, and ET4300.

    • Pick-up mechanism: Linear-Motion Pick-up

    • Measuring force: 0.5–500 µN, adjustable

    • 3D measurement:
      ET4000AK — Standard
      ET4000A / ET4000L / ET4300 — Optional

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